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Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)
Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)

Lam / Novellus Concept Two CVD (Chemical Vapor Deposition)

Asset #: 65020

Make: Lam / Novellus

Model: Concept Two

Wafer Sizes: 6 inch

Lam / Novellus Concept Two CVD (Chemical Vapor Deposition), 6"
- Cassette Load Lock Modules
- With 3 cassettes, a Motion Engineering Inc (MEI) 3 axis single arms robot
- Leybold TMP/NT 150/360V/H turbo pump
- Desorb Modules For wafer orientation and lamps heating
- Leybold TMP/NT 150/360V/H turbo pump
- Transport Modules
- Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot
- Leybold TMP 151/361, 600 and 1000 turbo pump
- PVD Cathode
- AE MDX Magatron Drive Power Supply
- CTI cryo on board 8 and 8300 compressor
- VAT Gate valve series 14 AlCu target 14” diameter
- PVD Cathode
- Same as 4. TaAl target 14” diameter
- Al, Ta Sputtering Process
- The C2 uses Ta-Al, Al-Cu targets for PVD sputtering on 6 inches wafers. - The film is Ta-Al 1100 Ao, Al-Cu 5200 Ao
- Production run rate = 75 wafers every pump down (2 hrs.)
- The machine does about 5-6 pump down on a 12 hours shift (about 375-450 wafers output per shift or 750-900 wafers per day)
- The current layout is Loadlock, Orienter / Desorb, Transport, 2 Process Chambers
- More process chambers can be added depending on process needs
- Each process chamber is equipped with an on-board 8 CryoPump

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