{"product_id":"65013","title":"KLA Surfscan SP 1 TBI Particle Defect System","description":"KLA Surfscan SP 1 TBI Particle Defect System\u003cbr\u003e- Cassette Load Lock Modules \u003cbr\u003e- Includes 3 cassettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, Leybold TMP\/NT 150\/360V\/H turbo pump \u003cbr\u003e- Desorb Modules \u003cbr\u003e- Leybold TMP\/NT 150\/360V\/H turbo pump \u003cbr\u003e- Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. \u003cbr\u003e- Leybold TMP 151\/361, 600 and 1000 turbo pump\u003cbr\u003e- PVD Cathode AE MDX Magatron Drive Power Supply\u003cbr\u003e- CTI cryo on board 8 and 8300 compressor\u003cbr\u003e- VAT Gate valve series 14 AlCu target 14” diameter \u003cbr\u003e- PVD Cathode Same as 4. TaAl target 14” diameter\u003cbr\u003e- Al, Ta Sputtering Process \u003cbr\u003e- The C2 is using Ta-Al, Al-Cu targets for PVD sputtering on 6 inches wafers\u003cbr\u003e- The film is Ta-Al 1100 Ao, Al-Cu 5200 Ao\u003cbr\u003e- The production run rate is 75 wafers every pump down which translates to 2 hrs. \u003cbr\u003e- 5-6 pump down on a 12 hours shift (about 375-450 wafers output per shift or 750-900 wafers per day)\u003cbr\u003e- The current layout is Loadlock, Orienter \/ Desorb, Transport, 2 Process Chambers\u003cbr\u003e- More process chambers can be added depending on process needs\u003cbr\u003e- Each process chamber is equipped with an on-board 8 CryoPump\u003cbr\u003e2001 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815731097790,"sku":"65013","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/11-done-5_8eb3b9bd-1150-4377-ad3a-1a71e84a6421.jpg?v=1739703750","url":"https:\/\/www.bridgetronic.com\/products\/65013","provider":"Bridge Tronic Global","version":"1.0","type":"link"}