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ASM Epsilon 2000
ASM Epsilon 2000
ASM Epsilon 2000
ASM Epsilon 2000
ASM Epsilon 2000
ASM Epsilon 2000
ASM Epsilon 2000
ASM Epsilon 2000

ASM Epsilon 2000

Asset #: 65001

Make: ASM

Model: Epsilon 2000

Wafer Sizes: 8 inch

ASM Epsilon 2000 , 8"
- RP system
- Process: N2, H2, DCS, Arsine, Phosphine/B2H6, HCL (Running EPI Process)
- Software v. 7.25.03
- Ethernet Card
- RP Chamber
- Old Style H2/HCL Detection
- Vacuum Load Locks
- Back-up Pilot Gas Option
- Upgraded USB interface Controller for Downloading/Uploading Software
- Recipes and Tool Configuration
- Bottom Feed Connection
- Left Panel Access
- Upgraded Bump Cassettes
- Gas Box STEC MFC's are Main - N2/H2 MFC = 150 SLM
- Shaft purge = 5 SLM
- N Main DOP MFC = 20 SLM
- N DOP Dilution MFC = 200 SCCM
- N DOP Injector MFC = 200 SCCM
- P Main DOP MFC =20 SLM
- P DOP Dilution MFC = 200 SCCM
- P DOP Injector MFC = 200 SCCM
- DCS MFC = 500 SCCM
- HCL Main MFC = 20 SLM
- HCL Etch MFC 3 SLM
- W/O SMIF Interface
2006 Vintage

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