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Leybold APS 1104 Optical Coater
Leybold APS 1104 Optical Coater

Leybold APS 1104 Optical Coater

Asset #: 64804

Make: Leybold

Model: APS 1104

Leybold APS 1104 Optical Coater
- Substrate Dome Size: 1100-1200MM
- Ion Source: APS Plasma Source
- Control System: K1 Main control unit,K2 Control unit
- Film Thickness Monitor: 6" Quartz crystal film thickness monitor
- EB Guns: (2) EB-Gun ESV14 / EB-Gun HVTen
- Substrate Heating
- Vacuum System: Roughing Pump, Diffusion Pumps ,Polycold(PFC-660-HC)
2000 Vintage

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