{"product_id":"64430","title":"Memsstar Orbis 3000 Cluster System","description":"Memsstar Orbis 3000 Cluster System, up to 8\"\u003cbr\u003e- Single cassette vacuum loadlock - VCE 6\u003cbr\u003e- Automatic loadlock door\u003cbr\u003e- MagnaTran LEAP Compact Robot - single frog leg blade\u003cbr\u003e- Transport module capable of supporting 3 memsstar process modules\u003cbr\u003eXeric Oxide Process Module (PM)\u003cbr\u003e- Wafer size: 8\"\u003cbr\u003e- Windows based PC control system: i5 processor, 8GB DDR4 memory, 500GB SSD\u003cbr\u003e- 19\" TFT (non touch screen)\u003cbr\u003e- Temperature controlled chamber body\u003cbr\u003e- Central gas feed with shower head gas distribution\u003cbr\u003e- Temperature controlled pedestal: 200mm pedestal, backside gas protection, wafer edge pin lift\u003cbr\u003e- Water vapor delivery system: Horibastec VC vaporizer\u003cbr\u003e- Gasses: devicent MFCs all N2 calibrated: HF, N2, H2, H20\u003cbr\u003e- Remove plasma source: MKS Astron-i: AX7670-60\u003cbr\u003e- Remote plasma source - gasses: O2, N2\u003cbr\u003eHeat Cool Station:\u003cbr\u003e- Wafer size: 200mm\u003cbr\u003e- Sequential heating then cooling of wafer: 200*C heated pedestal \/ \u0026lt;50*C on cool pedestal\u003cbr\u003e- N2 chamber purge\u003cbr\u003eOther:\u003cbr\u003e- Dedicated monitor and keyboard for system control at service area\u003cbr\u003e- Customised AC distribution box\u003cbr\u003e- Light tower - 4 colour\u003cbr\u003e- SECS\/GEM capable","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815663431870,"sku":"64430","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/4-5_5872268e-fbba-4162-8d2c-f80397647e68.jpg?v=1737555416","url":"https:\/\/www.bridgetronic.com\/products\/64430","provider":"Bridge Tronic Global","version":"1.0","type":"link"}