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Memsstar Orbis 3000 Cluster System
Memsstar Orbis 3000 Cluster System
Memsstar Orbis 3000 Cluster System
Memsstar Orbis 3000 Cluster System
Memsstar Orbis 3000 Cluster System
Memsstar Orbis 3000 Cluster System

Memsstar Orbis 3000 Cluster System

Asset #: 64430

Make: Memsstar

Model: Orbis 3000

Wafer Sizes: 2, 3, 4, 5, 6, 8, 12 inch

Memsstar Orbis 3000 Cluster System, up to 8"
- Single cassette vacuum loadlock - VCE 6
- Automatic loadlock door
- MagnaTran LEAP Compact Robot - single frog leg blade
- Transport module capable of supporting 3 memsstar process modules
Xeric Oxide Process Module (PM)
- Wafer size: 8"
- Windows based PC control system: i5 processor, 8GB DDR4 memory, 500GB SSD
- 19" TFT (non touch screen)
- Temperature controlled chamber body
- Central gas feed with shower head gas distribution
- Temperature controlled pedestal: 200mm pedestal, backside gas protection, wafer edge pin lift
- Water vapor delivery system: Horibastec VC vaporizer
- Gasses: devicent MFCs all N2 calibrated: HF, N2, H2, H20
- Remove plasma source: MKS Astron-i: AX7670-60
- Remote plasma source - gasses: O2, N2
Heat Cool Station:
- Wafer size: 200mm
- Sequential heating then cooling of wafer: 200*C heated pedestal / <50*C on cool pedestal
- N2 chamber purge
Other:
- Dedicated monitor and keyboard for system control at service area
- Customised AC distribution box
- Light tower - 4 colour
- SECS/GEM capable

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