{"product_id":"64134","title":"Intevac Matrix PVD (Physical Vapor Deposition)","description":"Intevac Matrix PVD (Physical Vapor Deposition)\u003cbr\u003eOverview:\u003cbr\u003e- Multiple chamber system enabling multi-layer thin film solar cell PVD applications (IBC, Cu Seed, HJT, PERL\/T)\u003cbr\u003e- Fully integrated automation for small substrate handling (low wafer breakage \u0026lt; 0.03%)\u003cbr\u003e- High speed transport and carrier technology for high system throughput (\u0026gt; 3000 wph, application dependent)\u003cbr\u003e- Enabling source technology (LSMA) for high target utilization and low cost of ownership\u003cbr\u003e- Integrated deposition chambers for advanced solar cell applications (Cu seed, PERL Back Metal, HJT)\u003cbr\u003e- Multiple chamber load locks enable high quality vacuum (low E-07) in small footprint \u003cbr\u003e- Short green-to-green time  with chamber isolation (\u0026lt; 6 hours)\u003cbr\u003e- Easy carrier modification to accommodate different substrate shapes and sizes (156mm, 125mm, square and pseudo-square)\u003cbr\u003eMatrix Unique Design:\u003cbr\u003e- Single row carrier design enables efficient PVD system through compact chamber dimensions\u003cbr\u003e- Small carrier enables high productivity, low cost load \/ unload mechanism\u003cbr\u003e- Overhead carrier return reduces footprint\u003cbr\u003e- LSMA source enables lowest cost of ownership (target)\u003cbr\u003eMatrix Automated Substrate Handling:\u003cbr\u003e- Integrated automation load \/ unload\u003cbr\u003e- High throughput (\u0026gt; 3000 wph)\u003cbr\u003e- Reliable performance (\u0026lt; 0.03% breakage rate)\u003cbr\u003e- Flexible substrate sizes\u003cbr\u003e- Extendible to thinner wafers \u003cbr\u003eMatrix Automation:\u003cbr\u003e- Integrated automation load \/ unload\u003cbr\u003e- High throughput (\u0026gt; 3000 wph)\u003cbr\u003e- Reliable performance (\u0026lt; 0.03% breakage rate)\u003cbr\u003e- Flexible substrate sizes\u003cbr\u003e- Extendible to thinner wafers \u003cbr\u003eLSMA Source:\u003cbr\u003e- High target utilization  (\u0026gt;65%)\u003cbr\u003e      - Scanning pole\u003cbr\u003e      - Tunable scan speed\u003cbr\u003e      - High scan acceleration\u003cbr\u003e      - Optimal edge erosion profile\u003cbr\u003e- Uniform target temperature control enables stable film properties\u003cbr\u003e- Planar target design beneficial for low target cost and complex materials\u003cbr\u003e- Magnet array is optimized to the target material\u003cbr\u003e- High magnet pole strength enables high pass-through flux (Magnetic films e.g. Nickel)","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815648129214,"sku":"64134","price":349100.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-6-done_8449f686-33a8-45fd-9639-66ab61bb5f4b.jpg?v=1737554623","url":"https:\/\/www.bridgetronic.com\/products\/64134","provider":"Bridge Tronic Global","version":"1.0","type":"link"}