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SUSS MA 150 CC Mask Aligner
SUSS MA 150 CC Mask Aligner
SUSS MA 150 CC Mask Aligner
SUSS MA 150 CC Mask Aligner
SUSS MA 150 CC Mask Aligner
SUSS MA 150 CC Mask Aligner

SUSS MA 150 CC Mask Aligner

Asset #: 64065

Make: SUSS

Model: MA 150 CC

Last Confirm Date: March 08, 2022

SUSS MA 150 CC Mask Aligner
- Machine base with vibration isolation
- Cassette to cassette handling
- X,Y,Q, Z, alignment stage
- Microscope al. System
- Machine prepared for vacuum, compressed air and nitrogen
- Electrical equipment 230V/50 Hz
- Prealign station for no edge-cont. Wafer 150mm
-Housing as MA150 E Type
- DVM 6 microscope
- Objective PL / 10x and CCD camera (2)
- Transport-plates kit W- 150mm
- Chuck cont / prox. W- 150mm
- Maskholder W- 150mm
- Exposure unit MA150 LH 1000 W
- Exposure optic UV400
- Lamp power supply CIC1200 CP and CI - control
- Auto / align AL 3000
- Operator Manual

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