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Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000
Applied Materials P 5000

Applied Materials P 5000

Asset #: 64059

Make: Applied Materials

Model: P 5000

Wafer Sizes: 8 inch

Applied Materials P 5000 , 8"
- Standard cassette loadlock
- Standard storage & robot
- Position A: process chamber (CVD)
- Position B: process chamber (CVD)
- 50/60 Hz
- 208V / 250 Amp / 5 Wires (R, S, T, N, G)
- N2 Vent: SST flared
- Facilities water in mainframe
- No monitor or UPS interface
- HDD and FDD
- Automatic interface: SECS I, II, Gem
- Water cooling
- Power cable and signal cable: 50'
- CVD heat exchanger type: AMAT - 0 standard head exchanger
- Signal Tower: 4 colors
- Cassette stage: A&B positions, clamp, 25 slots
- Storage Elevator: center find, 8 slots
- Buffer Chamber:
- Standard buffer type
- Slow & fast load lock venting & diffuser
- Fast load lock pumping
- Wafer detector: blade cap & vac sensor
- Pump interface
- Standard slit valve
- Top gas feed
- Millipore / Pall filters
- MKS 20 Torr chamber pressure gauge
- Process gas 1: N2, MFC range 5000sccm : Unit 1660
- Process gas 2: NH3, MFC range 30sccm : Unit 1660
- Process gas 3: N2O, MFC range 2000sccm : Unit 1660
- Process gas 4: N2, MFC range 2000sccm : Unit 1660
- Process gas 5: SiH4, MFC range 50sccm : Unit 1660
- ChA RF generator: OEM-12A
- ChB RF generator: OEM-12A
- Phase VI RF match type
- AMAT system heat exchanger

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