{"product_id":"63584","title":"Lam 2300 Exelan Flex EX+ Chamber","description":"Lam 2300 Exelan Flex EX+ Chamber\u003cbr\u003eChamber type:Flex EX Plus\u003cbr\u003eGas config.(sccm)=MFC full scale\u003cbr\u003eC4F8(50)\/CF4(200)\/O2(3000)\/Ar(1000)\/\u003cbr\u003eCO(500)\/CH3F(100)\/O2(30)\/CHF3(100)\/\u003cbr\u003eO2(300)\/Xe(500)\/C4F6(50)\/CH2F2(100)\/O2(10)\u003cbr\u003eSource 60MHz 2500W\/27MHz 3000W\/2MHz 8500W\u003cbr\u003eLid Temp Control ~140?\u003cbr\u003eESC Temp Control ~60?","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815581610174,"sku":"63584","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/63584","provider":"Bridge Tronic Global","version":"1.0","type":"link"}