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Oerlikon Balzers BAK 760 Evaporator
Oerlikon Balzers BAK 760 Evaporator
Oerlikon Balzers BAK 760 Evaporator

Oerlikon Balzers BAK 760 Evaporator

Asset #: 63332

Make: Oerlikon Balzers

Model: BAK 760

Wafer Sizes: 6 inch

Oerlikon Balzers BAK 760 Evaporator, 6"
- BPU420 E et VAX420
- EHV 110 Power supply,
- 1 multi crucible ESQ113 (4 pockets),
- 1 single crucible ESQ110,
- 2 EKS 110,
- 2 ETS 110 for crucible rotation,
- 1 QSK 300 head (mono quartz),
- 1 TPG300 gauges controller
- The tool was used to deposit
Aluminum
Titanum
Nickel
Gold
 
It was used for 6"
-3 platen of 12 positions in 6" = 36 wafers for 1 run
Platens are manually loaded out of the tool
 
Possible to use 3 platen of 5 positions for 8"
1995 Vintage

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