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Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)
Ebara FREX 200 CMP (Chemical Mechanical Polisher)

Ebara FREX 200 CMP (Chemical Mechanical Polisher)

Asset #: 62962

Make: Ebara

Model: FREX 200

Wafer Sizes: 8 inch

Ebara FREX 200 CMP (Chemical Mechanical Polisher), 8"
- Bottom configuration for: Slurry; CDA; N2; DIW; raw water; chilled water; wastewater
- Top configuration for: Polish and cleaner exhaust
- Load ports: 4
- Polishing unit:
- Topring: GenII 5 Zone carrier with PEEK plate
- Buff station: Round type 10”
- Waferloss sensor: CCD type
- Dresser: Light Weight Dresser 30-300N
- Table: Stainless steel materials
- End point monitor: TCM: L Side, R Side
- Zone Pressure Sensor Kit
- Top ring rotary joint (new 200mm CMP version: RJ with NO lip seal)
Slurry Supply:
- Slurry line: 1 x Roller pump system, 1 x Tokyo Keiso Flowcontroller / per side
1st Stage Cleaner 1:
- Roll sponge (Upper and lower roll)
- Megasonic
- 6 Waferroller, Hardness Duro90
- 2nd Stage Cleaner
- Pencil Sponge + SRD,
- Megasonic
Software System:
- Front, L Side, R Side Touch Monitors, 15"
- Windows 2000 Professional
Upgrades:
- Interlock and software for fluorescent lamp
- Single side recovery
- Slurry flow and error detection for slurry flow on GUI
- Mixed route
- Head: G 2
2000 Vintage

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