Axcelis NV GSD 200 E Medium Current Ion Implanter, 8"
- Energy Range: 180KeV
- Software Version: 6.4.4
- Workstation: Main only
- Cell Controller: 177 partnr 11002540
- SECS/GEM: Sec Network Card
- Mechanical Frame: Bolted
- Filament P.S: EMS 10-60 - Lambda - P/N: 1214110
- Cathoden P.S: Lumina Power Inc - P/N: 120005295
- Arc P.S: EMS 150-7 - Lambda - P/N: 1204990
- Source Controller: P/N: 1184800
- Dose DI:UDC 2 - P/N: 11028840
- Source Assy: Eterna ELS4
- Source Bushing: Red old - P/N: 170111300
- Extraction Electr: ODE: P/N: 1181634
- Source Injector Bleed: P/N: 11020570
- Extraction Suppression Supply:Glassman - PS/NV-15NN33 (15KV 33mA) - P/N: 2200158
- Extraction Supply: HiTek Power - OL8000/104/05
- EMER:P/N: 1190500
- Aperture / Flag Faraday: P/N: 11019550 - with Aperture
- Disk Faraday (fixed/TSDF): MidField - P/N: 1199240
- E-SHWR/SEF/PEF:PEF Xenon - P/N: 11049260
- Electron Flood Gas Panel: P/N: 11051430
- Beamline Turbo (P8): Leypold Turbovac 1000C - P/N: 31001620466
- Post Accel PS: Advance HiVolt
- Post Accel Manipulator: P/N: 11028640
- Source Isolation Trans:XFMR (5kVA) - P/N: 240000590
- Terminal Isolation Transformer: P/N: 2400116
- Cooling: Affinity 11025010
- Wafer Transfer: P/N: 11026600
- Macobot:P/N: 11026570
- Load Lock: P/N: 1176550
- Gyro:P/N: 11023110
- Rotary Drive Controller: Direct Drive - P/N: 11026580
- Y-Scan Controller: P/N: 11026580R
- Flowhood: no
- Disk Vac DI: Present (DISK VACCUM DI) 1195140
- Light tower: Present (3COLOR)
- Process Disk: 200mm - ALU (non Si coated)
- Cassette Table:P/N: 11016690
- Aligner:P/N: 11016300
- Vac Cassette/Stand: P/N: 11027730
- In Air Robot: P/N: 4693-0031-0001C (non metal pick)
- Wafer Holder: P/N: 110091240
- In Vac Arm: P/N: 110047380
- V3 Bellows: Yes
- G/P Controller (E/S): 360 Stabil
- E/S IG3 Stabil/Glas: 360 Stabil
- Gas Box: P/N: 11035500
- Mod Gas Modul: Modular (2 HP,2 SDS)
- MFC Type As: SDS – MKS
- MFC Type PH: SDS – MKS
- MFC Type BF3: MKS 10sccm
- MFC Type Ar:MKS 10sccm
- P1: PFEIFFER HiPace 2300 UT - PM P04 546 B
- P1 Safety Ring (Seiko 2203) installed: No
- P8: yes - see above for type
- Cryo Pump: Remote
- Freq. Converter: Yes
- Type Cryo Compressor: CTI Cryogenics Helix Technologies 9650 P/N 8135911G001
- Cryo Compressor P2/P3 9650: P/N: 11026530
- Cryo Interfacebox: P/N: 8113048G003
- HYT: No
- Beamguide Gas: No
- Air interface box terminal: SMC 1913100
- Air interface box in vac: P/N:1909770 (SMC 1909770)
- Air interface 2 (near InVac-Arm) : P/N:1909440 (SMC 1909440)
- Air interface1 (above IG2) : P/N: 1909430 (SMC 1909430)
- LeadFloor: No
- Slot To Slot: No
- Bar Code Reader: Yes
- Burn Thru Sensor: P/N: 1177460
- Smif: No
- UPS: No
- Remarks: Flow hood missing, no roughpumps included
(Edwards setup), lower machine front panels missing
2004 Vintage