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Canon Anelva Cosmos  I-1201
Canon Anelva Cosmos  I-1201
Canon Anelva Cosmos  I-1201
Canon Anelva Cosmos  I-1201
Canon Anelva Cosmos  I-1201
Canon Anelva Cosmos  I-1201
Canon Anelva Cosmos  I-1201
Canon Anelva Cosmos  I-1201
Canon Anelva Cosmos  I-1201

Canon Anelva Cosmos  I-1201

Asset #: 62901

Make: Canon Anelva

Model: Cosmos  I-1201

Last Confirm Date: January 22, 2022

Canon Anelva Cosmos  I-1201
- T-S001-(14) Process CH-A(SLA-ICP) 1Set
- T-S001-(15) Process CH-B(Cooling) 1Set
- T-S001-(16) Process CH-C(Unused main Cu PVD) 1Set
- T-S001-(17) Process CH-D(Main Cu PVD process) 1Set
- T-S001-(18) Process CH-E(Ti Process) 1Set
- T-S001-(19) Process CH-F(Heat Process) 1Set
- LD and ULD are equipped with TDK Foup 12" ×3 port and Rorze atmospheric transport robot
2002 Vintage

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