{"product_id":"62227","title":"Trion Minilock II Plasma RIE (Reactive Ion Etcher)","description":"Trion Minilock II Plasma RIE (Reactive Ion Etcher)\u003cbr\u003e- Electrical Specs: 208VAC 3 Phase\u003cbr\u003e- Operational Status: Powered on, Software booted\u003cbr\u003e- The unit requires a passcode for the Hardware \u0026amp; Maintenance menus, but the passcode is unknown\u003cbr\u003e- Advance Energy RFX 600A RF \u003cbr\u003e- Plasma Generator \u003cbr\u003e- MKS 153 Control Valve\u003cbr\u003e- VAT 02110-BH24-0001\/0039 \/ A-358183 Rectangular Gate Valve\u003cbr\u003e- Gas Cabinet with six Unit Instruments - Mass Flow Controllers\u003cbr\u003e    - Four of the Mass Flow Controllers are model UFC-1800 (Gas: N2, two 100cc, and two 250cc), two are model UFC-1660 (100cc BCl3, and 100cc CL2)\u003cbr\u003e    - The six gas lines are labeled \"CF4,\" \"O2,\" \"BCL3,\" \"CHF3,\" \"SF6,\" and \"CL2.\"","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815420555454,"sku":"62227","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-done-78_c42db0c6-3b35-4caa-a895-dcad7476f65d.jpg?v=1737545309","url":"https:\/\/www.bridgetronic.com\/products\/62227","provider":"Bridge Tronic Global","version":"1.0","type":"link"}