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Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher
Lam Rainbow 4420 Plasma Etcher

Lam Rainbow 4420 Plasma Etcher

Asset #: 62008

Make: Lam

Model: Rainbow 4420

Wafer Sizes: 8 inch

Lam Rainbow 4420 Plasma Etcher, 8"
- Chamber Body: AL Anodize
- Source Type: Plasma System
- RF Power: OEM-12A
- Endpoint: Photodiode Optical
- Pressure Control: AC2
- Temp Contol: Chiller / Unisem
- Chuck Type: ESC Type 8"
- Match: Manual
Process Gas
- O2 100 sccm: Unit / UFC-1200
- O2 300 sccm: Unit / UFC-1200
Componants
- Chamber Pump: IQDP80/QMB500 / 1ea
- L/L Pump: IQDP80 / 1ea
2010 Vintage

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