{"product_id":"61720","title":"Tel Trias Metal CVD (Chemical Vapor Deposition)","description":"Tel Trias Metal CVD (Chemical Vapor Deposition)\u003cbr\u003e- Ti\/TiN\u003cbr\u003e- Configured for 4 chambers\u003cbr\u003eGas Supply Config\u003cbr\u003e- Manual valve N*: Yes\u003cbr\u003e- Regulator (N2-1\/N2-2): Yes\u003cbr\u003e- Regulator (N2-PF): Yes\u003cbr\u003e- Regulator (Ar): Yes\u003cbr\u003e- Pressure sensor (All gas line): No\u003cbr\u003e- Filter (N2-PF): No\u003cbr\u003e- Manual valve (Dry air line): Yes\u003cbr\u003e- Filter (Dry air line): No\u003cbr\u003e- Regulator (Dry air line): No\u003cbr\u003e- Pressure sensor (Dry air line): No\u003cbr\u003e- Pressure gauge (Dry air line): No\u003cbr\u003eChamber TEL TRIAS TIN\u003cbr\u003e- 1333Pa Manometor: Yes\u003cbr\u003e- 133kPa Capacitance manometer: Yes\u003cbr\u003e- O-rings: Yes\u003cbr\u003e- O-rings: Yes\u003cbr\u003e- O-rings, Cubic Trap I\/O: Yes\u003cbr\u003e- Gate Valve (Slit Valve): Yes\u003cbr\u003e- APC Valve: Yes\u003cbr\u003e- Cubic Trap: Yes\u003cbr\u003e- Vacuum valve(VEP1): Yes\u003cbr\u003e- Vacuum valve(VEP2,3): Yes\u003cbr\u003e- Pressure Gauge, exhaust system: Yes\u003cbr\u003e- Flow Meter for cooling water: No\u003cbr\u003e- Water Leak Sensor: Yes\u003cbr\u003eGas Box Configuration\u003cbr\u003e- Gas Stick 1: Yes\u003cbr\u003e- Gas Stick 2: Yes\u003cbr\u003e- Gas Stick 3: Yes\u003cbr\u003e- Gas Stick 4: Yes\u003cbr\u003e- Gas Stick 5: Yes\u003cbr\u003e- Gas Stick 6: Yes\u003cbr\u003e- Gas Stick 7: Yes\u003cbr\u003e- Gas Stick 8: Yes\u003cbr\u003e- DLI: Yes\u003cbr\u003e- Heater Bottom Purge: Yes\u003cbr\u003e- Air Operation Valves: Yes\u003cbr\u003e- Gas Filters: Yes\u003cbr\u003e- Regulators: Yes\u003cbr\u003e- Gas lockout system: Yes\u003cbr\u003eKit Parts: \u003cbr\u003e- STAGE HEATER ASSY,ELPR STG HTR Ver2.4: Yes ( Ver2.5)\u003cbr\u003e- TiN Shower Base: Yes\u003cbr\u003e- \"Inludes Plate Shower Spacer  300tin S1, Plate Shower Head \u003cbr\u003e- 300tin, Block Gas Diffusion, Screw Long Head M6x15, Screw M6x28, Spring Washer Spak M6, Tube Gas Inlet 300tin, Washer Flat..M6 Ma22 Rglr:\u003cbr\u003e- Ti Shower Head\u003cbr\u003e- Ti Quartz Filler\u003cbr\u003e- TiN Shower Plate\u003cbr\u003e- TiN Shower Block\"\u003cbr\u003e2007 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815376089278,"sku":"61720","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/5-done-18_2299eaf1-8a89-460e-8db2-9a19fed0f21e.jpg?v=1737542795","url":"https:\/\/www.bridgetronic.com\/products\/61720","provider":"Bridge Tronic Global","version":"1.0","type":"link"}