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Perkin Elmer 4450 Sputtering System
Perkin Elmer 4450 Sputtering System
Perkin Elmer 4450 Sputtering System
Perkin Elmer 4450 Sputtering System
Perkin Elmer 4450 Sputtering System
Perkin Elmer 4450 Sputtering System
Perkin Elmer 4450 Sputtering System
Perkin Elmer 4450 Sputtering System
Perkin Elmer 4450 Sputtering System

Perkin Elmer 4450 Sputtering System

Asset #: 61510

Make: Perkin Elmer

Model: 4450

Last Confirm Date: October 08, 2021

Perkin Elmer 4450 Sputtering System
- Load/Lock: Isolation Valve to Main Chamber
- Gas Control: MFC, Throttle Valve
- Granville Phillips 303 with Ion Gauges
- CT-8 Cryo & Cryo Compressor
3 Target Head Assembly With:
- RF Diode Assemblies (3)
- OEM RF P/S With Switcher
- RF Matching Unit
- J Arm for 6" Wafer
Rebuild:
- CT-8 Cryo Pump
- SC Compressor
- All Rough Valves replaced with new valves
- Replace all O-Rings
- Clean and Install Shielding
- All Feedthrus
- Table Assy
- Wire UP RF Power Supply
- Target Assemblies
- Install New Ion Gauges
- Install MFC Calibrated to Customer Spec
- Mech Pump Leybold D 60

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