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Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating

Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating

Asset #: 61309

Make: Oerlikon Balzers

Model: BAK 1052

Last Confirm Date: January 09, 2023

Oerlikon Balzers BAK 1052 Evaporation System for Vacuum Coating
- The diameter of the substrate holder carousel is about 1050mm.
- The distance between the carousel and the platform of the electron gun is about 850mm
- with 2 E-beam evaporation sources (SiO and TiO) with crucibles and coils
- N*2 shutter, heater with 2 resistors right/left
- Optical measure system (missing the quartz system)
- Carousel with its motor
- Pumping group: roots (to be revisioned / overhaul) Not rotative
- No. 2 E-beam filament drivers (needs to be revisioned / overhaul)
- E-beam rack with triode
- N*2 EKS 110; no high voltage board; missing some dischargers, N*1 TA (current meter) and the high voltage main switch
- Cooling system: Needs to be refurbished. All the flowmeters are missing (Kobold)
- PC RACK: Some optical boards and PCB MM420 and PCB 8043 are missing
- Machine has a setup for installing Meissner and Baffle

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