{"product_id":"61185","title":"MRL Phoenix 836 Diffusion Furnace","description":"MRL Phoenix 836 Diffusion Furnace\u003cbr\u003e- 4 Stack \u003cbr\u003e- Software: GMI Host\u003cbr\u003e- Controller: MRL ICCI\u003cbr\u003e- Heating element type: MRL AZTEC HELIX 0440803538 R00\u003cbr\u003e- Ovens 1,2,3 have Poly-Si tubes installed for processing wafers up to 5\"    \u003cbr\u003e- Tube inner diameter = 180mm\u003cbr\u003e- Oven 4 has 6\" Quarz tube. Inner diameter = 217mm\u003cbr\u003e- SiC paddles for all ovens\u003cbr\u003e- Machine is configured for N2, O2, H2\u003cbr\u003e- Original torches are installed and functional\u003cbr\u003e- MFCs functional and calibrated for all gas lines\u003cbr\u003e- Original board is operational\u003cbr\u003e- 3 ovens have connected bubbler systems, integrated with N2 carrier flow\u003cbr\u003e- 4th oven has space for integrating another bubbler system\u003cbr\u003e- 12 original eurotherm to control all 4 ovens\u003cbr\u003e- Functional electro-preumatic control system with digital output\u003cbr\u003e1995 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815329001662,"sku":"61185","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/IMG_0521-done.jpg?v=1737540786","url":"https:\/\/www.bridgetronic.com\/products\/61185","provider":"Bridge Tronic Global","version":"1.0","type":"link"}