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Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P
Axcelis NV 8200 P

Axcelis NV 8200 P

Asset #: 60940

Make: Axcelis

Model: NV 8200 P

Wafer Sizes: 8 inch

Axcelis NV 8200 P , 8"
- Dose2, Block3
- Energy Config: 0 - 250Kv Midcurrent
- CE-Conformity: Yes
- Cryo-Pumps: 3x CTI Onboard 8
- Cryo-Kompressor: CTI 9650 Low-Voltage
- Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C
- Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250
- Clamp-Type: E-Chuck with Non-μC Controller
- Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger
- Gasbox: 3x Toxic 0,5L Size
- String1: Argon Carriergas; SEC-4400
- String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks
- String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640
- String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640
- Beam-Profiler Type: Belt-Drive
- Gear-Type's: Scan: Harmonic Tilt: Harmonic
- Source-Type: ELS4 IHC-Source without Vaporizer
- HV-Transformer: Mineral-Oil
- Light-Tower: red/yellow/green; no buzzer
- Main-Workstation: Solaris SUN AXI 4HE
- Second-Workstation:Solaris SUN Sparc5
- Software-Version: 5.1.4.1
- Network: 24port 100MB Ethernet with XXXXXX Router-Kit
- Cell-Controller: 177 Type
- Completeness: Total; missing parts:Lower Lock Plate(waiting
spare part), clean room table; BF3-High-Pressure Gauge; Chiller(only Heatexchanger)
- Technic special customized: minor modifications: Upper-Lock; Xfer-Arm;
E-Shower Controller; Flow-Switch; Barcode- Reader; ELS4-Source; Chiller
- Any damages/deficits known: transformer only 200kv
1995 Vintage

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