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Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B
Nikon NSR S 204 B

Nikon NSR S 204 B

Asset #: 60780

Make: Nikon

Model: NSR S 204 B

Wafer Sizes: 8 inch

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Nikon NSR S 204 B , 8"
Resolution: ≀ 180 nm
- SMP Result = 165nm
Distortion: Dynamic: ≀+/-20nm (X and Y)
- X =10nm y =1nm
Mag Control Accuracy: <+/-10nm
- H-I = 3.5nm
- C-I = 4.0nm
Max Exposure Area:
- 25mm x 33mm
Reticle Blinds Accuracy: .4mm to .8mm
- y= 0.7 x=.65
Reticle Rotation Accuracy: IxI+3σ≀ 15nm
- 3nm
Illumination Power: β‰₯ 1000 mW/cm2 (NA/Οƒ = 0.68/0.75)
- 1257 mW/cm2
Telecentricity: ≀ 25 uRad
- -0.024 uRad
Illumination Uniformity: ≀1.3% (NA/Οƒ = 0.68/0.75)
- 1.03%
Integrated Exposure control: +/-1.3%
- -0.110%
Stepping Precision: 3σ≀ 20nm
- X = 10nm y = 14nm
Array Orthogonality: +/-0.1sec
- -0.227 urad.046 sec
Alignment Accuracy: IxI+3Οƒ ≀ 35nm (FIA)
- X = 28nm Y = 21nm
Focus Cal Repeatability: 3σ≀ 80nm
- X = 4n Y = 5nm
Wafer Loader Pre-align Repeatability: 3Οƒ ≀ 15um
- X = 2.5um Y = 2.6um T = 1.9um
Focus Leveling Repeatability: 3σ≀ 80nm
- Plus Scan = 13nm Minus Scan = 15nm
System 100 wafer Operational Test
- Cycled 100 wafer though tool with no errors

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