{"product_id":"60779","title":"Plasmatherm Versaline CVD-RIE (Chemical Vapor Deposition - Reactive Ion Etching)","description":"Plasmatherm Versaline CVD-RIE (Chemical Vapor Deposition - Reactive Ion Etching), 8\"\u003cbr\u003e- HDP-CVD \u0026amp; ICP-RIE Cluster System\u003cbr\u003e- Electrostatic chuck\u003cbr\u003e- Temperature Management System (-40 to +40°C)\u003cbr\u003e- HDPCVD Heated ICP Source w\/medium-power RF pkg.\u003cbr\u003e- HDPCVD Optical Emission Interferometry\u003cbr\u003e- EndpointWorks 2.0 HDPCVD\u003cbr\u003e- Etch, +10 to 180°C\u003cbr\u003e- HDPCVD Dry backing pump (1,600L)\u003cbr\u003e- Heated ICP source w\/medium power (2.0kW) RF pkg\u003cbr\u003e- ICP RIE Electrostatic chuck\u003cbr\u003e- VCx-300H Material Handler w\/Single 25-wafer cassette load port\u003cbr\u003e- Optical Aligner\u003cbr\u003e- Facet-Mounted\u003cbr\u003e- Drytek PS80 pump package\u003cbr\u003e2015 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815281750206,"sku":"60779","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/3-done-31_855f2e93-3793-43cc-8f88-a2900283f912.jpg?v=1737538383","url":"https:\/\/www.bridgetronic.com\/products\/60779","provider":"Bridge Tronic Global","version":"1.0","type":"link"}