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Canon FPA 2000 i 1 Stepper
Canon FPA 2000 i 1 Stepper
Canon FPA 2000 i 1 Stepper
Canon FPA 2000 i 1 Stepper

Canon FPA 2000 i 1 Stepper

Asset #: 60473

Make: Canon

Model: FPA 2000 i 1

Canon FPA 2000 i 1 Stepper
Exposure capabilities:
- Projection lens: UL31
- Magnification: 1/5 Times
- Numerical Aperture (NA): 0.52
- Resolution: 0.5µm L&S / less
- Image field size: Φ 28.3mm (22.5 x 17.1 m) Exposure wave length: i-Line (365 nm)
Illumina time system:
- Light source: 1.5 kW Ultra high pressure mercury lamp (1.5 Constant input power) Exposure light quantity control: Light integrator Masking mechanism
Reticle alignment:
- Alignment light: i-Line (365 nm)
- Method: i-Line TV image processing (FRA)
Wafer alignment
- Alignment light: i-Line (365 nm)
- He-Ne laser illumination
- D2 illumination
Method:
- TTL on-axis with i-line TV image processing TTL off-axis with He-Ne laser TV image processing TTL off- axis with B image processing Alignment mode: Die-by-die, AGA
Auto focus:
- Light auto focus
- Focus compensation of barometric pressure effect Focus compensation of i-Line illumination
Wafer tilt:
- Global tilt
- Die-by-die tilt
Wafer feeding:
- Method: Backside handling non-edge contact
- Carrier: Fluoroware / CCA type cassette
Reticle changer:
- Reticle storage capacity: Individual reticle cassettes
Mechanical pre-alignment: Periphery non-contact method TV pre-alignment: TV image processing.

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