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Applied Materials Centura HP PVD Cluster (Physical Vapor Deposition)
Applied Materials Centura HP PVD Cluster (Physical Vapor Deposition)
Applied Materials Centura HP PVD Cluster (Physical Vapor Deposition)
Applied Materials Centura HP PVD Cluster (Physical Vapor Deposition)
Applied Materials Centura HP PVD Cluster (Physical Vapor Deposition)

Applied Materials Centura HP PVD Cluster (Physical Vapor Deposition)

Asset #: 60366

Make: Applied Materials

Model: Centura HP

Applied Materials Centura HP PVD Cluster (Physical Vapor Deposition)
- 50/60Hz, 144kW
Includes:
- 2ea process chamber + cooling & clean
- Control cabinet w/ Leybold Harris & CTI controllers
- AMAT shield treatment controller
- KSI shield treatment supply
- Advanced Energy MDX-L6 RF supply
- Advanced Energy MDX-L12M RF supply
- RFPP LF10A RF supply
- Comdel CPS1001S RF supply
- Power control cabinet, 208V,
- BOC Edwards QDP40 vacuum pump
- BOC Edwards QDP40 vacuum pump w/ QMB250 booster
- CTI-Cryogenics 9600 compressor
- Neslab recirculating chiller
1994 Vintage

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