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Applied Materials Centura 5200 Dry Oxide Etch Cluster Tool
Applied Materials Centura 5200 Dry Oxide Etch Cluster Tool
Applied Materials Centura 5200 Dry Oxide Etch Cluster Tool
Applied Materials Centura 5200 Dry Oxide Etch Cluster Tool
Applied Materials Centura 5200 Dry Oxide Etch Cluster Tool

Applied Materials Centura 5200 Dry Oxide Etch Cluster Tool

Asset #: 60365

Make: Applied Materials

Model: Centura 5200

Applied Materials Centura 5200 Dry Oxide Etch Cluster Tool
- 208V, 3ph, 60Hz, 72kVA
Includes:
- Dual process chambers
- Control/power cabinet w/ transformer module
- Seiko turbopump controllers
- RF cabinet w/ 2ea ENI OEM-12B3 RF generators
- 2ea BOC Edwards iQDP80 vacuum pumps
- 2ea iQDP40 vacuum pumps
- 2ea SMC INR-496-002D-X007 recirculating chillers

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