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Applied Materials Centura 5200 Dry Etcher
Applied Materials Centura 5200 Dry Etcher
Applied Materials Centura 5200 Dry Etcher
Applied Materials Centura 5200 Dry Etcher
Applied Materials Centura 5200 Dry Etcher

Applied Materials Centura 5200 Dry Etcher

Asset #: 60361

Make: Applied Materials

Model: Centura 5200

Applied Materials Centura 5200 Dry Etcher
3ea process chamber+clean, w/ RF supply cabinet containing:
- 1ea RFPP LF10A RF supply
- 1ea RFPP RF20R RF supply
- 3ea ENO IEM-12B3 RF generators
- Power supply cabinet, 208V, 60Hz, 139kVA
Includes:
- 4ea BOC Edwards QDP80 vacuum pumps
- 2ea BOC Edwards QDP40 vacuum pumps
- 3ea Neslab HX 150-CHX recirculating chillers
- 1ea Neslab Steelhead 1 CHX recirculating chiller
1996 Vintage

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