{"product_id":"58580","title":"GSI Lumonics UltraDep 1 PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"GSI Lumonics UltraDep 1 PECVD (Plasma-Enhanced Chemical Vapor Deposition), 4\", 6\"\u003cbr\u003e- Load lock tool\u003cbr\u003e- Single wafer load\u003cbr\u003e- 400C max process temperature\u003cbr\u003e- Dual Frequency RF supply for stress control (13.56 MHz and 200 KHz)\u003cbr\u003e- Microprocessor\/computer controlled \u003cbr\u003e- TEOS silicon oxide: normal \u0026amp; low stress\u003cbr\u003e- Silicon oxide\u003cbr\u003e- Silicon nitride: stoichiometric \u0026amp; low stress\u003cbr\u003e- Amorphous silicon: doped and undoped\u003cbr\u003e- Oxynitrides: 1.46 - 2.0 refractive index range\u003cbr\u003e- TEOS Oxide\u003cbr\u003e- PSG, BSG, and BPSG\u003cbr\u003e- Spare Parts Included: 2 heaters, MFCs\u003cbr\u003e- Without pumps\u003cbr\u003e2000 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44806787399870,"sku":"58580","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/GSI_PECVD-done-1.jpg?v=1737107106","url":"https:\/\/www.bridgetronic.com\/products\/58580","provider":"Bridge Tronic Global","version":"1.0","type":"link"}