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Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper
Canon FPA 5000 ES 2 + Stepper

Canon FPA 5000 ES 2 + Stepper

Asset #: 58433

Make: Canon

Model: FPA 5000 ES 2 +

Wafer Sizes: 8, 12 inch

Canon FPA 5000 ES 2 + Stepper, 8", 12"
- High NA covers 0.18 um to 0.15 um design rules using 248 KrF illumination
- The Platform features a reaction force receiver on both the reticle and wafer stages.
- Active dampers are added to the wafer stage to prevent machine vibrations from occurring via the fab floor.
- The stage features frictionless air bearings and improved vibration isolation.
- The wafer stage is of the new FLAT II design.
- The bar mirrors are hollow and the tilt plate is constructed with beams.
- The lenses are assembled using Ultima PM1 data to minimize aberrations.
2000 Vintage

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