{"product_id":"57947","title":"Aixtron AIX 2800 G 4 HT MOCVD (Metal Organic Chemical Vapor Deposition)","description":"Aixtron AIX 2800 G 4 HT MOCVD (Metal Organic Chemical Vapor Deposition), 4\"\u003cbr\u003e- Capacity: 6\"×6 or 4\"×11 or 2\"×24\u003cbr\u003e- Susceptor dimension: D520mm×T19mm\u003cbr\u003e- Chamber coil (9 channels)\u003cbr\u003e- Hydride Line : 1xNH3, 2xDopant\u003cbr\u003e- Purifier: H2, N2, NH3\u003cbr\u003e- Pump : DOR pump(SH-110), Ebara pump(ESA70)\u003cbr\u003e-H2 Purifier (IN LINE Type)\u003cbr\u003e- Maker TERATECH\u003cbr\u003e- Model TPH-LP-500S(100S)\u003cbr\u003e- Gas: Hydrogen\u003cbr\u003e- Process Methods: Line Purifier\u003cbr\u003e- Flow Rate(Nm³\/hr) : 10.30.50.75.100.150.300\u003cbr\u003e- Impurities Removed: H.O.HO.CO.CO\u003cbr\u003e2011 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44806693454014,"sku":"57947","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/13-done-2_32285e1c-9b56-482f-9b25-5f6dd6e814f2.jpg?v=1737104580","url":"https:\/\/www.bridgetronic.com\/products\/57947","provider":"Bridge Tronic Global","version":"1.0","type":"link"}