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BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace
BTI BDF 4 Furnace

BTI BDF 4 Furnace

Asset #: 57749

Make: BTI

Model: BDF 4

Wafer Sizes: 2, 3, 4, 5, 6, 12 inch

Last Confirm Date: September 30, 2025

BTI BDF 4 Furnace, up to 6"
- Four stack Oxidation / diffusion furnaces
- One furnace is right handed (loading right to left)
- One furnace is left handed
- 4 tube horizontal diffusion furnace
- Heavy duty BTU boatloaders & Unit Instrument MFC's for gas control
- BTU 7351C DDC process controller provided at each tube level
- Designed to process up to 125 mm (5") wafers
- 150 mm (6") wafers can be processed by installing the largest quartz tube
- Come with spares
1984 Vintage

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