Thermo Fisher Scientific / FEI Helios 450 S Dual Beam
Electron source: Schottky thermal field emitter; Elstar UC Column
Ion source - Gallium liquid metal, 1000 hours; Tomahawk Column
Landing Voltage
- 50 V - 30 kV SEM
- 500 V - 30 kV FIB
STEM resolution – 0.8 nm
- Optimal WD : 0.8 nm @ 15 kV, 0.8 nm @ 2 kV, 0.9 nm @ 1 kV, 1.5 nm @ 200 V with beam
decleration
- Coincident WD : 0.8 nm @ 15 kV, 0.9 nm @ 5 kV ,1.2 nm @ 1 kV
Ion beam resolution at coincident point
- 4.5 nm @ 30 kV using preferred statistical method
- 2.5 nm @ 30 kV using selective edge method
Stage
- FlipStage with in-situ STEM detector and Omniprobe sample extractor
- 5 axis all piezo motorized
- 100 mm XY motion
- Load lock (80 mm max. diameter)
Max. sample size – 80 mm diameter with full travel
User interface –Windows® GUI with integrated SEM, FIB, GIS, simultaneous patterning and
imaging mode
Configuration:
- GIS 1: Carbon C10H8
- GIS 2: Tungsten W(CO)6
- GIS 3: Platinum C5H4CH3Pt(CH3)3
- Omniprobe (1)
- Detectors (ETD,TLD,ICE) (1)
- Chiller (NESLAB ThermoFlex900) (1) provided from ONEAC
- Pre Vacuum Pump (XDS10i) (1) provided from the system
- Transformer (ONEAC) (1) 200V AC 1-Phase
- UPS(Apco) : 100V AC 1-Phase
Software versions:
- xTUI version 5.4.2.3177
- Autoprobe version 4.1.0
- Auto Slice and View G3 1.2.0.1703
- Auto FIB 3.8.5
- Auto TEM G2 5.4.1.452
- iFast 1.3.2.11
- FEI Licensing 1.3
- RAPID 3.0.0
- FEI Swift 1.2.0.323
- Health Monitor 1.3.0.15824
2008 Vintage