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Canon MPA 600 Super Mask Aligner

Asset #: 57449

Make: Canon

Model: MPA 600 Super

Wafer Sizes: 4, 5, 6 inch

Canon MPA 600 Super Mask Aligner, 4", 5", 6"
- Resolution: 1.5 um
- Illumination: 2 KW High Pressure Mercury Lamp. Intensity @ 1800 watts power output.
- CTC: Monitors and controls system temp within +/- 3 degrees C
- Automatic Pneumatic Distortion Control: provides fine distortion compensation
- Depth of focus: +/- 6 um (linewidth 1.5 um)
- Auto Alignment: LBS AA 3Sigma < 0.58um (HeNe Laser beam scan). TV AA 3 Sigma < 0.43um (TV image processing)
1997 Vintage

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