{"product_id":"57327","title":"KLA \/ Leica VB 6 HR E-Beam Lithography","description":"KLA \/ Leica VB 6 HR E-Beam Lithography\u003cbr\u003e-\tDose modulation was working with hiccups; this seemed solved before shutdown;\u003cbr\u003e-\tThe SEM image used by the operator to locate the markers for alignment and perform tool tuning shows signal loss from time to time;\u003cbr\u003ethis can be solved by manually changing the video settings with the control software;\u003cbr\u003e-\tBoards in the analog electronics cabinet show blinking red LEDs. The tool was working even in this condition, so the problem is still open;\u003cbr\u003e-\tAirlock gets stuck from time to time while moving from one position to the other;\u003cbr\u003e-\tLeakage in a compressed air line: easily solvable when the tool is switched off\u003cbr\u003e1997 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44815001190590,"sku":"57327","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-done-33_dcdf8195-fd91-43a4-8dd2-8232e424ce69.jpg?v=1737526923","url":"https:\/\/www.bridgetronic.com\/products\/57327","provider":"Bridge Tronic Global","version":"1.0","type":"link"}