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KLA / Leica VB 6 HR E-Beam Lithography

Asset #: 57327

Make: KLA / Leica

Model: VB 6 HR

KLA / Leica VB 6 HR E-Beam Lithography
- Dose modulation was working with hiccups; this seemed solved before shutdown;
- The SEM image used by the operator to locate the markers for alignment and perform tool tuning shows signal loss from time to time;
this can be solved by manually changing the video settings with the control software;
- Boards in the analog electronics cabinet show blinking red LEDs. The tool was working even in this condition, so the problem is still open;
- Airlock gets stuck from time to time while moving from one position to the other;
- Leakage in a compressed air line: easily solvable when the tool is switched off
1997 Vintage

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