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Ulvac Ei 5 K Batch Type High Vacuum Evaporation System for ITO
Ulvac Ei 5 K Batch Type High Vacuum Evaporation System for ITO
Ulvac Ei 5 K Batch Type High Vacuum Evaporation System for ITO

Ulvac Ei 5 K Batch Type High Vacuum Evaporation System for ITO

Asset #: 57224

Make: Ulvac

Model: Ei 5 K

Wafer Sizes: 4 inch

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Ulvac Ei 5 K Batch Type High Vacuum Evaporation System for ITO, 4"
Equipment ran 4" Sapphire wafers
2" - 6" Capable
Main system: (Including Power supply)
Used amount or use pressure: 3Ø200V±10% 50kVA
Connection: M8 terminal
Type: Cooling Water
Main system: Main system
Used amount or use pressure: 0.2~0.3MPa 8(L/min) or more
Connection: In:3/4Rc Out:3/4Rc
Condition: 20~28℃
Type: Cooling Water
Main system: Cryo compressor
Used amount or use pressure: 0.2~0.3Mpa 7(L/min) or more
Connection: In:3/8Rc Out:3/8Rc
Condition: 20~28℃
Type: Cooling Water
Main system: EB gun
Used amount or use pressure: 0.35~0.7MPa 12(L/min) or more
Connection: In:1/2Rc Out:1/2Rc
Condition: 20~25℃
Type: DRY PUMP (LR 90)
Used amount or use pressure: 0.2~0.3MPa 5L/min or more
Connection: In:3/8Rc Out:3/8Rc .
Condition: 20~28℃
*Water back pressure : Less than 0.05MPa
2011 Vintage

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