GEA-5 KCF-141 A R2R Auto Alignment Single Side Exposure System
- Working material(RFID): Thickness :20μm ~200μm
- Top side pasted sensitizer dry film
- Width : 500~550mm
- Working material roll: Core diameter 3", Outer diameter Max.400mm
- Both edge 5mmis dummy area
Un-winder & cleaning:
- Un-winder distensible reel 3"
- Ionizer blower : after stick roller
- EPC(Edge Position Control)
- Material connection table
- Speed: Range 0.5-10m/min
- Sticky roller device
- Unwinder tension: With digital meter display %
Equipment ability:
- Speed: 2 panel/min (Included exposure time)
- Line/Space: 50μm /50μm (Vacuum mode)
- Exposure gap (Grey area): ±0.1mm
- Position alignment: ±0.1mm
Exposure:
- One collimated lamp from top side and single side exposure.
- Able to select the exposure mode by time or UV energy value.
- UV energy detector for main wavelength 365 nm
- By vacuum exposure.
- UV Intensity ： ＞25mw/cm2
Exposure lamp:
- Lamp type: 5KW arc collimated lamp
- Effective exposure area: Max 500mm x 600mm
- Uniformity : > 90%
- Reflector by optic mirror
- Collimation Half Angle:1.5°
- Declination Angle:1.5°
- Turn-on the lamp by electrical power supply system.
Exposure table
- Top side exposure
- Top table: By glass with auto alignment structure.
- Down table: By vacuum system
- Vacuum level can be adjustable.
Alignment:
- CCD Lens: By coaxial lens CCD x 4 sets,
- With Monitor
- Alignment accuracy: +-10um (Center)
Exposure booth:
- Cleanness: Inside booth with HEPA Filter
- Static-electricity remover: With ionizer blower.
- Temperature: With chiller cooling to keep temperature < 25℃
Winder:
- Pulling material: The distance can be setting, accuracy ±0.5mm
- Winder distensible reel 3"
- Ionizer blower: Before winder.
- EPC(Edge Position Control)
- Speed: Range 0.5-10m/min
- Winder tension: With digital meter display %