{"product_id":"57099","title":"SPTS \/ STS MACS ICP Etcher (Inductively Coupled Plasma)","description":"SPTS \/ STS MACS ICP Etcher (Inductively Coupled Plasma), 6\", 8\"\u003cbr\u003e- ASE with Bosch process\u003cbr\u003e- HR Chamber for High Rate Etch\u003cbr\u003e- MACs Loader for Cassette to Cassette Operation (2 Load stations)\u003cbr\u003e- Carousel vacuum load lock\u003cbr\u003e- Helium Backside Cooling\u003cbr\u003e- Clamp type: Standard WTC\u003cbr\u003e- RF Generators: AE RFG3001, ENI ACG-3B \u003cbr\u003e- Gases: \u003cbr\u003eC4F8(200 sccm)、SF6(1000 sccm)、O2(200 sccm)、Ar (50 sccm) \u003cbr\u003e- Load lock pump: Ebara AAL 10\u003cbr\u003e- Chamber pump: Ebara A 30 W\u003cbr\u003e- Chiller: Affinity PWG-160 L- BE 27 CBD 2\u003cbr\u003e2001 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44814988673214,"sku":"57099","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/3-3-done_39575d69-d0d4-4109-98e4-8e9c766a8e07.jpg?v=1737526171","url":"https:\/\/www.bridgetronic.com\/products\/57099","provider":"Bridge Tronic Global","version":"1.0","type":"link"}