{"product_id":"57039","title":"SPTS \/ STS MACS ICP Etcher (Inductively Coupled Plasma)","description":"SPTS \/ STS MACS ICP Etcher (Inductively Coupled Plasma), 8\"\u003cbr\u003e- Advanced Silicon Etch (ASE) with Bosch process\u003cbr\u003e- HR Chamber for High Rate Etch\u003cbr\u003e- Set up for 200mm wafer (150mm-200mm capable)\u003cbr\u003e- MACs Loader for Cassette to Cassette operation (2 load stations)\u003cbr\u003e- Carousel vacuum load lock\u003cbr\u003e- Helium Backside Cooling (HBC)\u003cbr\u003e- HBC Assy: ICP V2\u003cbr\u003e- Clamp Type: Standard WTC\u003cbr\u003e- Lower Electrode: ICP WTC Tripod Lift\u003cbr\u003e- Chamber Insulation Jackets: None\u003cbr\u003eChiller: Affinity\u003cbr\u003eVacuum System: \u003cbr\u003e- Turbo Pump: LEYBOLD MAG 2000\u003cbr\u003e- Load Lock Pump: EBARA AA10\u003cbr\u003e- Chamber Pump: EBARA A30W\u003cbr\u003eGases: C4F8(200 sccm)、SF6(1000 sccm)、O2(2000 sccm)、N2 (500 sccm)\u003cbr\u003eRF Generators:\u003cbr\u003e- Coil RF Power : ENI GHW-50Z 5kw\u003cbr\u003e- Platen RF Power : ENI ACG-3B 13.56MHZ, 300W\u003cbr\u003e2003 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44814986215614,"sku":"57039","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/3-2-done-1_ff7b4829-f476-4753-90b6-ccfd155091fa.jpg?v=1737525880","url":"https:\/\/www.bridgetronic.com\/products\/57039","provider":"Bridge Tronic Global","version":"1.0","type":"link"}