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Tel Act 8 Coater

Asset #: 56390

Make: Tel

Model: Act 8

Wafer Sizes: 8 inch

Tel Act 8 Coater, 8"
- Dual Block
- 4x Coat, 4x Develop
- Right to Left Wafer Flow
- 4COT (2COT+2TCT) + 4DEV + 1IFB
- Full oven configuration with 6PHP
- Block#2 : 2ADH, 4CPL, 7LHP (5LHP on Central Stack), 4HHP, 1TRS, 1TCP, 2CWH
- Block#3 : 6PHP, 8LHP (5LHP on Central Stack), 4CPL
- Interfaced to ASML PAS5500 DUV Step/scanner
- Block#1
- Type#3 controller
- 16 RDS resist pumps
- Block#2
- 2-1 Standard COT : 4 Resist Nozzles with 4 RDS resist pumps
- 2-2 Standard COT : Same as 2-1
- 2-3 TCT (Top ARC) : 4 Resist Nozzles with 4 RDS resist pumps
- 2-4 TCT (Top ARC) : 4 Resist Nozzles with 4 RDS resist pumps
- 2ADH, 4CPL, 7LHP (5LHP on Central Stack), 4HHP, 1TRS, 1TCP, 2CWH
- Block#3
- 3-1 Develop Unit : 1 SH Nozzle
- 3-2 Develop Unit : 1 SH Nozzle- Missing parts.
1.  PRA : PRA1 Spin Motor Driver 1ea
2.  Spin Units : Spin Motor Driver 3ea and EBR Flow Meter 4ea
3.  IFB
A.   IRA X-Axis Motor Driver 1ea
B.   IRA Y-Axis Motor Driver 1ea
C.   IRA Z-Axis Motor Driver 1ea
D.   IRA Z-Axis Assembly 1ea- 3-3 Develop Unit : 1 SH Nozzle
- 3-4 Develop Unit : 1 SH Nozzle
- 6PHP, 8LHP (5LHP on Central Stack), 4CPL
- Block#4
- Interfaced to ASML PAS5500 DUV Step/scanner
- WEE
- External Chemical Supply Cabinet : 2ea
- Thermo-controller Unit : 2ea
- AC Power Unit : 1ea

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