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Axcelis Purion M High Temperature SiC Ion Implanter

Asset #: 56203

Make: Axcelis

Model: Purion M

Wafer Sizes: 8 inch

Axcelis Purion M High Temperature SiC Ion Implanter, 8"
- 335 KeV Terminal Voltage Module
- TDK TAS300 LP with Mapping
- 200mm ESC
- Moly ELS Source, Spr Clamp, VAp, Lined
- (2) AEF Cryo Pumps
- Cryo Pump Kit: 3 x FX Cryos
- Cryo Compressor IS2000
- Heat Exchanger Remote 50 Feet
- Gas Panel Assy with #7 Bottle
- CGA 580 1/4" Fitting
- Process Chamber Liners
- Machine Overhead Exhaust Kit
- Terminal RP1 Floor Exhaust
2017 Vintage

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