{"product_id":"55517","title":"Applied Materials P 5000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Applied Materials P 5000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)\u003cbr\u003e- Depo Rate: Oxide 6000Å\/min\u003cbr\u003e- Uniformity: 5% ↓\u003cbr\u003eGases: 12 Line:\u003cbr\u003e- GAS 1 200 sccm Sih4\u003cbr\u003e- GAS 2 100 sccm NH3\u003cbr\u003e- GAS 3 3000 sccm N2\u003cbr\u003e- GAS 4 2000 sccm N20\u003cbr\u003e- GAS 5 2000 sccm CF4 or SF6\u003cbr\u003e- GAS 6 n\/a\u003cbr\u003e- GAS 7 200 sccm Sih4\u003cbr\u003e- GAS 8 100 sccm NH3\u003cbr\u003e- GAS 9 3000 sccm N2\u003cbr\u003e- GAS 10 2000 sccm N2O\u003cbr\u003e- GAS 11 2000 sccm CF4 or SF6\u003cbr\u003e- GAS 12 n\/a\u003cbr\u003eAC Power:\u003cbr\u003e- AC input (208volts,3Phase 5wires : 200A)\u003cbr\u003e- Fuse for AC\/DC power box.\u003cbr\u003e- 1.2 kw and 13.56 Mhz RF Power Supply.\u003cbr\u003eMainframe Configuration:\u003cbr\u003e- Mark Ⅱ\u003cbr\u003e- 150mm\u003cbr\u003e- I\/O Wafer Sensor\u003cbr\u003e- 21slot VME\u003cbr\u003e- Phase 3 Robot\u003cbr\u003e- Phase 3 Cassette Handler\u003cbr\u003e- 8 Slot Storage Elevator\u003cbr\u003e- Viton O-ring all change.\u003cbr\u003e- Standard clean gas box installed.\u003cbr\u003e- Software version 4.26\u003cbr\u003ePressure control system:\u003cbr\u003e- Throttle valve\u003cbr\u003e- Isolation valve open\/close type\u003cbr\u003eTemp control: Lamp Heated\u003cbr\u003eVacuum system (option):\u003cbr\u003e- Chamber : QDP80+QMB500 Pump.\u003cbr\u003e- Load lock chamber : ADP80\u003cbr\u003e*Pumping Line \u0026amp; Regulator Not Included\u003cbr\u003eDimension \u0026amp; Facility:\u003cbr\u003e- Physical Dimensions\u003cbr\u003e- Power Requirements\u003cbr\u003e- Exhaust Requirements\u003cbr\u003e- Cooling Water\u003cbr\u003e- Nitrogen\u003cbr\u003e- Compressed Air (CDA or N2)","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44814865891518,"sku":"55517","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/IMG_5410-done.jpg?v=1737519190","url":"https:\/\/www.bridgetronic.com\/products\/55517","provider":"Bridge Tronic Global","version":"1.0","type":"link"}