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Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper
Nikon NSR 1505 G 7 E Stepper

Nikon NSR 1505 G 7 E Stepper

Asset #: 55515

Make: Nikon

Model: NSR 1505 G 7 E

Wafer Sizes: 6 inch

Nikon NSR 1505 G 7 E Stepper, 6"
- Lens distortion within ±100nm (including magnification error)
- Open flame (max. exposure area): square 15.0mm (vertical 17.5mm / horizontal 12.5mm)
- Focus check date within ≤ +/-0.3um
- Lamp power 500 mW/cm2
- Lamp uniformity within 3.0%
- Dose control accuracy within ± 1.0% (integrated exposure stability)
- Reticle blind +0.4mm ~ + 0.8mm
- Reticle rotation accuracy: absolute value within 0.03um of target value. Repeatability within 0.02um
- LSA Telecen within ≤ +/-0.5um
- LSA repeatability within ≤ 0.2um
- Overlay within ≤ +/-0.15um
- Stepping accuracy 3σ ≤ 90nm
- Wafer type: Flat
- Reticle size: 5"
Wafer loader:
- Cassette table (2 set)
- All ceramic arm
Reticle loader:
- PPD
- 5" reticle
Wafer stage:
- X, Y, Z, T, leveling stage
- Chip leveling
- Wafer holder: 6" ring type
Illumination:
- Lens type: NA: 0.54
- Max exposure area: 15mm square to 12.5(H)mm x 17.5(V)mm
- Reduction ratio: 5X
- Lamp power supply unit
Alignment:
- WGA, LSA laser power supply unit
- Alignment method: WGA, LSA
System:
- MCS2 version
- Floppy drive for storage of system parameters
- Environment chamber

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