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Nikon NSR 2205 i 14 E 2 i-Line Stepper

Asset #: 55466

Make: Nikon

Model: NSR 2205 i 14 E 2

Wafer Sizes: 8 inch

Last Confirm Date: March 23, 2020

Nikon NSR 2205 i 14 E 2 i-Line Stepper, 8"
Magnification: 1/5 Reduction
Light-source: I-line 365 nm
Resolution: 0.35 um
Lens NA: 0.50 ~ 0.63 (Variable)
Exposure filed size: 22 mq
Bellows control
Lens adjuster: Micrometer / PIEZO / Washer
Lamp: 2.5 kW Hg
PC Type: DMCC
No UPS
Reticle size, 6"
Reticle microscope: Fixed
Alignment sensor: LSA, FIA, TTLFC2
SHRINC 4 Illumination systemInterferometer system:
5517C Type
Wafer stage
Reticle stageMulti focus system
Table leveling system
Signal towerWafer loader:
Type 3
OF Wafer
(2) Wafer cassettes
Wafer in-line: Left
Wafer pre-align type: NC PRE2Reticle loader:
30 Slots
Barder reader
PPD3 Particle checkerControl rack:
Type: Normal (Right)
Cable length: NormalChamber:
ASAHI N4A-C Chamber
Double NEMA (CVCF)BATC: 23.0°
CATC: 23.0°
LLTC: 23.0°Power supply: 208 V, 60 Hz, 3 Phase
2001 Vintage

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