{"product_id":"55466","title":"Nikon NSR 2205 i 14 E 2 i-Line Stepper","description":"Nikon NSR 2205 i 14 E 2 i-Line Stepper, 8\"\u003cbr\u003eMagnification: 1\/5 Reduction\u003cbr\u003eLight-source: I-line 365 nm\u003cbr\u003eResolution: 0.35 um\u003cbr\u003eLens NA: 0.50 ~ 0.63 (Variable)\u003cbr\u003eExposure filed size: 22 mq\u003cbr\u003eBellows control\u003cbr\u003eLens adjuster: Micrometer \/ PIEZO \/ Washer\u003cbr\u003eLamp: 2.5 kW Hg\u003cbr\u003ePC Type: DMCC\u003cbr\u003eNo UPS\u003cbr\u003eReticle size, 6\"\u003cbr\u003eReticle microscope: Fixed\u003cbr\u003eAlignment sensor: LSA, FIA, TTLFC2\u003cbr\u003eSHRINC 4 Illumination systemInterferometer system:\u003cbr\u003e5517C Type\u003cbr\u003eWafer stage\u003cbr\u003eReticle stageMulti focus system\u003cbr\u003eTable leveling system\u003cbr\u003eSignal towerWafer loader:\u003cbr\u003eType 3\u003cbr\u003eOF Wafer\u003cbr\u003e(2) Wafer cassettes\u003cbr\u003eWafer in-line: Left\u003cbr\u003eWafer pre-align type: NC PRE2Reticle loader:\u003cbr\u003e30 Slots\u003cbr\u003eBarder reader\u003cbr\u003ePPD3 Particle checkerControl rack:\u003cbr\u003eType: Normal (Right)\u003cbr\u003eCable length: NormalChamber:\u003cbr\u003eASAHI N4A-C Chamber\u003cbr\u003eDouble NEMA (CVCF)BATC: 23.0°\u003cbr\u003eCATC: 23.0°\u003cbr\u003eLLTC: 23.0°Power supply: 208 V, 60 Hz, 3 Phase\u003cbr\u003e2001 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44814860452030,"sku":"55466","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/55466","provider":"Bridge Tronic Global","version":"1.0","type":"link"}