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CHA Mark 50 Thermal Evaporator
CHA Mark 50 Thermal Evaporator
CHA Mark 50 Thermal Evaporator
CHA Mark 50 Thermal Evaporator
CHA Mark 50 Thermal Evaporator

CHA Mark 50 Thermal Evaporator

Asset #: 55358

Make: CHA

Model: Mark 50

CHA Mark 50 Thermal Evaporator
- Power Supply: 208VAC, 64KVA, 60Hz, 3phase
- Process gas lines: Process N2, Ar PCW ~10 GPM @ 70F
- Vacuum system controlled by PLC system, Siemens Simatic S7-300
- Rough Vacuum: Edwards E2M-80 FSPX
- High Vacuum: CTI On-Board 400 Cryopump, CTI 9600 compressor. Process vacuum pressure is closed-loop controlled
- CHA standard heater controller, heater lamp, with shutter. Deposition system
- (Qty: 4) 9” by 3” Sierra Applied Sciences DC Magnetron cathodes
- (Qty: 1) Pinnacle Plus dual 6KW magnetron power supply.
- (Qty: 1) Pinnacle Plus dual 10kW magnetron power supply
- Four shutters, one for each cathode.
- Ion etch system
- Ion tech 15cm DC Ion Source
- Ion Tech GFC-1000-U gas controller
- Ion Tech MPS-5001 DC ion source power supply
- IT-30 cathode module
- IT-40 discharge module
- IT-50 Beam module
- IT-60 PBN module
- IT-81 controller module Fixturing system
- (Qty: 4) 10” diameter planets orbit in the vertical plane in a “Ferris wheel” planetary system
- Uniformity is approximate +/- 1% over an 8-inch diameter. Deposition Control
- This system was configured to run “on time”. There is no IC/5 deposition controller
- The user interface is a CHA written application (written in Wonderware) running on the Siemens computer running Windows NT
- The PC interfaces to a Siemens Simatic S7 PLC, which interfaces the computer to the CHA system hardware
- Chamber can be run in manual mode or in the full auto mode under PC/PLC control
2010 Vintage

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