{"product_id":"55104","title":"Tel Alpha 8 S LPCVD (Low Pressure Chemical Vapor Deposition)","description":"Tel Alpha 8 S LPCVD (Low Pressure Chemical Vapor Deposition), 8\"\u003cbr\u003ePolySi \u0026amp; Silicon nitride \/ Silicon dioxide\u003cbr\u003eCassette to cassette operation\u003cbr\u003eThermal processing capabilities\u003cbr\u003eGases:\u003cbr\u003e- MFC 1: O2, 5 SLM\u003cbr\u003e- MFC 2: N2, 20 SLM\u003cbr\u003e- MFC 3: N2, 5 SLM\u003cbr\u003e- MFC 4: ClF3, 5 SLM\u003cbr\u003e- MFC 5: HCl, 500 SCCM\u003cbr\u003e- MFC 6: SiH2Cl2, 200 SCCM\u003cbr\u003e- MFC 7: House N2, 5 SLM\u003cbr\u003e- MFC 8: Ar, 10 SLM\u003cbr\u003e- MFC 9: SiH4, 200 SCCM\u003cbr\u003e- MFC 10: SiH4, 2.0 SCCM\u003cbr\u003e- MFC 11: NH3, 2 SLM\u003cbr\u003e- MFC 13: H2, 10 SLM\u003cbr\u003eIncludes:\u003cbr\u003e- EBARA Turbo pump\u003cbr\u003e- TS-4000Z Controller","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44814716797118,"sku":"55104","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/55104","provider":"Bridge Tronic Global","version":"1.0","type":"link"}