Skip to content
Skip to product content

Tel Alpha 8 S LPCVD (Low Pressure Chemical Vapor Deposition)

Asset #: 55104

Make: Tel

Model: Alpha 8 S

Wafer Sizes: 8 inch

Last Confirm Date: March 06, 2020

Tel Alpha 8 S LPCVD (Low Pressure Chemical Vapor Deposition), 8"
PolySi & Silicon nitride / Silicon dioxide
Cassette to cassette operation
Thermal processing capabilities
Gases:
- MFC 1: O2, 5 SLM
- MFC 2: N2, 20 SLM
- MFC 3: N2, 5 SLM
- MFC 4: ClF3, 5 SLM
- MFC 5: HCl, 500 SCCM
- MFC 6: SiH2Cl2, 200 SCCM
- MFC 7: House N2, 5 SLM
- MFC 8: Ar, 10 SLM
- MFC 9: SiH4, 200 SCCM
- MFC 10: SiH4, 2.0 SCCM
- MFC 11: NH3, 2 SLM
- MFC 13: H2, 10 SLM
Includes:
- EBARA Turbo pump
- TS-4000Z Controller

Recommended Products


Equipment Sourcing:

Unmatched Expertise in Global Procurement

See More of Our Equipment

At Bridge Tronic Global, we leverage our extensive network and industry expertise to source high-quality semiconductor manufacturing equipment from trusted suppliers worldwide. Whether you're looking for cutting-edge technology or reliable pre-owned equipment, our sourcing capabilities ensure that you receive the best options tailored to your needs.

We understand that every client's requirements are unique, so we prioritize transparency, thorough vetting, and a deep understanding of the global market to secure the right equipment for your operations. Our team is dedicated to delivering timely, cost-effective solutions without compromising on quality or performance.


Wafer test machine

Refurbishment: Restoring Excellence, Maximizing Value

At Bridge Tronic Global, our refurbishment services breathe new life into used semiconductor manufacturing equipment, ensuring peak performance at a fraction of the cost. Our expert technicians meticulously restore equipment from leading brands like KLA andΒ Hitachi, applying rigorous testing and quality control measures. Whether you need a single piece refurbished or a fleet of equipment overhauled, we deliver reliable, high-performing solutions that extend the lifespan of your assets while optimizing your budget.

Cart

Your cart is currently empty