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GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)
GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)

GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition)

Asset #: 55070

Make: GSI Lumonics

Model: UltraDep 1000

Wafer Sizes: 8 inch

GSI Lumonics UltraDep 1000 PVD (Physical Vapor Deposition), 8"
- Recipe driven automated controls
- SiO2 and Si3N4 films, amorphous Si
- SiO2 rates: 1000-3000 angs/min
- Si3N4 rate: 350 angs/min
- Gases: SiH4 5%/He bal., N2, O2, N2O, He

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