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Akrion Velocity Goldfinger Wafer Cleaner
Akrion Velocity Goldfinger Wafer Cleaner
Akrion Velocity Goldfinger Wafer Cleaner
Akrion Velocity Goldfinger Wafer Cleaner
Akrion Velocity Goldfinger Wafer Cleaner
Akrion Velocity Goldfinger Wafer Cleaner

Akrion Velocity Goldfinger Wafer Cleaner

Asset #: 55019

Make: Akrion

Model: Velocity Goldfinger

Akrion Velocity Goldfinger Wafer Cleaner
- Comes with extra CDU
Velocity4 Base Assembly
- Support four (4) cleaning chemistry
- Fast Swap End Effector for Wafers
- (Qty: 3) I/O port stage - 12" FOUP
- (Qty: 3) Wafer mapping sensor
- EFEM / Asyst Spartan
- Controller: main system scheduler, EFEM
- Single DIW aerator and enclosure
- Goldfinger XP megasonic electronics
Process Chamber 12"
- (Qty: 4) Single wafer cleaning and spin dry
- (Qty: 4) Goldfinger XT1.5 megasonic transducer
- (Qty: 4) Sahara XT dryer
- (Qty: 4) JetStream-Nano advanced spray
Advanced Etch:
- Manual valve to switch between Top-Side and Top-Linear Dispense
Advanced Etch:
- (Qty: 3) Top-Side Dispense only
Chemical Delivery:
- (Qty: 4) SC1, Solvent/H2O2, Solvent/NMP, Solvent Pre-mix
Front and backside chemical dispense nozzles:
- (Qty: 4) only Chem 1 and 2 available on backside
Digital Video Recording System (DVR):
- 8 Cameras - 4 Chambers, 4 EFEM
CBS for Solvent: DI:H2O2
- Max temp 40C
- Chemical Blending Slave 1 / CS1-B
CBS for SC1:
- Max temp 40C
- Chemical Blending Master 1 / CM-B
CDS for Solvent (NMP):
- Max temp 40C
- Chemical Dispense Slave 2 / CS2-B
Bulk Supply Connection for Solvent (Pre-Mix)
2007 Vintage

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